Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano121: Difference between revisions
New page: == The nano1.21 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe nano1.21''' |- ! rowspan="6" align="center"| Recipe | Gas | C<sub>4</sub>F<sub>8</sub> 75 sccm, SF<su... |
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! rowspan="6" align="center"| Recipe | ! rowspan="6" align="center"| Recipe | ||
| Gas | | Gas | ||
| C<sub>4</sub>F<sub>8</sub> 75 sccm, SF<sub>6</sub> | | C<sub>4</sub>F<sub>8</sub> 75 sccm, SF<sub>6</sub> 38 sccm | ||
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| Pressure | | Pressure | ||