Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions
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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Dope_with_Phosphorus click here]''' | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Dope_with_Phosphorus click here]''' | ||
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==Test of the Phosphorus Predep furnace== | ==Test of the Phosphorus Predep furnace== | ||
====Purpose==== | ====Purpose==== | ||
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==Test of the Phosphorus Predep furnace== | ==Test of the Phosphorus Predep furnace== | ||
====Purpose==== | ====Purpose==== | ||
To find the result of a specific process using the Phosphorus Predep furnace (A4) followed by a drive in and oxidating the substrate in the Phosphorus drive in furnace (A3). | To find the result of a specific process using the Phosphorus Predep furnace (A4) followed by a drive in and oxidating the substrate in the Phosphorus drive in furnace (A3). | ||
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==Phosphorous doping test after hardware and software upgrades== | ==Phosphorous doping test after hardware and software upgrades== | ||
In 2022, the POCl<sub>3</sub> line on the furnace was modified to make the setup more safe. At the same time some software changes were also made, and the recipes on the furnace were updated. | In 2022, the POCl<sub>3</sub> line on the furnace was modified to make the setup more safe. At the same time some software changes were also made, and the recipes on the furnace were updated. | ||