Specific Process Knowledge/Thermal Process/RTP Jipelec 2: Difference between revisions
Appearance
| Line 177: | Line 177: | ||
==Existing PID and Pyro Calibration Tables== | ==Existing PID and Pyro Calibration Tables== | ||
In order to guarantee a smooth temperature control while processing, it is important that the right couple of tables - PID and Pyrometer Calibration - are selected in the recipe. There are multiple PID and Pyro Calibration tables available at the tool, which were developed and optimized by the process specialists in the Thin Film group. These are material-dependent, so they are labeled with abreviations of the conditions it should be used for. You can access the list of the existing tables in the '''[https://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=459 tool's Labmanager page]''' , under documents. | In order to guarantee a smooth temperature control while processing, it is important that the right couple of tables - PID and Pyrometer Calibration - are selected in the recipe. There are multiple PID and Pyro Calibration tables available at the tool, which were developed and optimized by the process specialists in the Thin Film group. These are material-dependent, so they are labeled with abreviations of the conditions it should be used for. You can access the list of the existing tables in the '''[https://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=459 tool's Labmanager page]''', under documents. | ||
*PID tables - This table contains the necessary coefficients that regulate the power output, in a smooth and control way, to keep the temperature at the desired setpoint while processing. | *PID tables - This table contains the necessary coefficients that regulate the power output, in a smooth and control way, to keep the temperature at the desired setpoint while processing. | ||