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Specific Process Knowledge/Thermal Process/Resist Pyrolysis furnace: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Pevo (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
2,366 edits
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|style="background:LightGrey; color:black"|Process Temperature
|style="background:LightGrey; color:black"|Process Temperature
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*No vacuum: 25 <sup>o</sup>C - 1100 <sup>o</sup>C
*No vacuum: 25 <sup>o</sup>C - 1050 <sup>o</sup>C, max 3 hours at 1050 <sup>o</sup>C
*Vacuum: 25 <sup>o</sup>C - 1050 <sup>o</sup>C  
*Vacuum: 25 <sup>o</sup>C - 1050 <sup>o</sup>C, max 3 hours at 1050 <sup>o</sup>C  
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|style="background:LightGrey; color:black"|Process pressure
|style="background:LightGrey; color:black"|Process pressure
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