Specific Process Knowledge/Thin film deposition/Deposition of Titanium Oxide: Difference between revisions
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!Generel description | !Generel description | ||
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*Evaporation of Ti pellets in the presence of a O<sub>2</sub> flow. | *Evaporation of Ti or TiO<sub>2</sub> pellets in the presence of a O<sub>2</sub> flow. | ||
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*Reactive DC sputtering of Ti target | *Reactive DC sputtering of Ti target | ||