Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
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==E-beam evaporation of Aluminium== | ==E-beam evaporation of Aluminium== | ||
Aluminium can be deposited by e-beam assisted evaporation in the Wordentec | Aluminium can be deposited by e-beam assisted evaporation in the Wordentec and the two Temescal tools. | ||
*[[/Al Ebeam evaporation in Temescal |E-beam evaporation of Al in Temescal]] | *[[/Al Ebeam evaporation in Temescal |E-beam evaporation of Al in Temescal]] | ||