Specific Process Knowledge/Thermal Process/RTP Jipelec 2: Difference between revisions
| Line 63: | Line 63: | ||
|style="background:WhiteSmoke; color:black;" align="left"|Limited use. | |style="background:WhiteSmoke; color:black;" align="left"|Limited use. | ||
|- | |- | ||
|style="background:Silver; color:black"|Forming gas (4% H<sub>2</sub>/N<sub>2</sub>) | |style="background:Silver; color:black"|Forming gas (4% H<sub>2</sub>/ 96% N<sub>2</sub>) | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
*40-2000 sccm | *40-2000 sccm | ||