Specific Process Knowledge/Thermal Process/RTP Jipelec 2: Difference between revisions
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!style="background:silver; color:black" align="center" align="center" rowspan="4"|Process gas | !style="background:silver; color:black" align="center" align="center" rowspan="4"|Process gas | ||
|style="background:Silver; color:black"|Ar | |style="background:Silver; color:black"|Argon (Ar) | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
* | *40-2000 sccm | ||
|style="background:WhiteSmoke; color:black;" align="center"| | |style="background:WhiteSmoke; color:black;" align="center"| | ||
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|style="background:Silver; color:black"| | |style="background:Silver; color:black"|Nitrogen (N<sub>2) | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
* | *40-2000 sccm | ||
|style="background:WhiteSmoke; color:black;" align="left"|Limited use. | |style="background:WhiteSmoke; color:black;" align="left"|Limited use. | ||
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|style="background:Silver; color:black"| | |style="background:Silver; color:black"|Forming gas (4% H<sub>2/96% N<sub>2) | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
* | *40-2000 sccm | ||
|style="background:WhiteSmoke; color:black;" align="left"|'''Not connected and not tested'''. No recipes available. | |style="background:WhiteSmoke; color:black;" align="left"|'''Not connected and not tested'''. No recipes available. | ||
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