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Specific Process Knowledge/Lithography/Mix-and-match: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
2,179 edits
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The two different methods for pattern alignment. Image: Thomas Pedersen.
The two different methods for pattern alignment. Image: Thomas Pedersen.
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=Mix-and-match resists=
==nLOF2020==
nLOF2020 is found to work as a negative resist for both UV and EBL exposure. After EBL exposure the exposed resist exhibit sufficient contrast change to allow alignment in the MLA systems (specifically verified on MLA2). While it is possible to expose the default 1.5 µm resist layer obtained from the Gamma spin coater system with EBL, in order to obtain a resolution advantage one must dillute the resist to produce a thinner coating as described below.
===Proposed workflow===
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