Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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==Top Side Alignment== | ==Top Side Alignment== | ||
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<span style="color:red">New specs after the new writehead has been installed - section will be updated soon.</span> | <span style="color:red">New specs after the new writehead has been installed - section will be updated soon.</span> | ||
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'''Overlay accuracy (spec):''' 0.5µm | '''Overlay accuracy (spec):''' 0.5µm | ||
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!Rotation [ppm] | !Rotation [ppm] | ||
|- | |- | ||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|rowspan="2"|4 alignment marks | |||
375nm, high res camera | |||
(Taran Apr 2023) | |||
|'''X''' | |||
| 6 | |||
|rowspan="2" align="center"|0.004 | |||
| -0.5±0.08 | |||
| -0.51±0.05 | |||
| -0.3±1.7 | |||
| 0.6±1.2 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|'''Y''' | |||
| 9 | |||
| -0.3±0.08 | |||
| -0.27±0.05 | |||
| 1.1±1.7 | |||
| -1.1±1.2 | |||
|- | |- | ||