Specific Process Knowledge/Etch/Wet Aluminium Etch: Difference between revisions
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!Location | !Location | ||
|Bath inside Wet Bench 05 in D-3 | |Bath inside Wet Bench 05 in D-3 | ||
| | |Bath inside Wet Bench 05 in D-3 | ||
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!Batch size | !Batch size | ||
|1-25 wafers at a time | |1-25 wafers at a time | ||
| | |1-25 wafers at a time | ||
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|4" wafers | |4" wafers | ||
6" wafers | 6" wafers | ||
| | |4" wafers | ||
6" wafers | |||
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See the [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=381 Cross Contamination Sheet] for Aluminium Etch bath | See the [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=381 Cross Contamination Sheet] for Aluminium Etch bath | ||
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See the [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=381 Cross Contamination Sheet] for Aluminium Etch bath | |||
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