Specific Process Knowledge/Back-end processing/Micro transfer printer: Difference between revisions
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Revision as of 10:43, 31 August 2023
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Equipment info in LabManager - requires login
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| Purpose |
UV exposure | ||
|---|---|---|---|
| Performance | Exposure mode |
| |
| Exposure light/filters |
| ||
| Minimum structure size | |||
| Mask size |
5x5inch optinal | ||
| Alignment modes |
No alignment possible | ||
| Substrates | Substrate size |
Up to 8inch substrates, different shapes | |
| Allowed materials |
All cleanroom materials | ||
| Batch |
1 | ||