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Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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*SF<sub>6</sub>: 1200 sccm
*SF<sub>6</sub>: ?(<20) sccm
*O<sub>2</sub>: 200 sccm
*O<sub>2</sub>: 200 sccm
*C<sub>4</sub>F<sub>8</sub>: 400 sccm
*C<sub>4</sub>F<sub>8</sub>: 400 sccm
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