Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano142: Difference between revisions
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*Barc etch in Pegasus 1 at -19 deg, 40s | *Barc etch in Pegasus 1 at -19 deg, 40s | ||
*Nano 1.42 at -19 deg, 5 min | *Nano 1.42 at -19 deg, 5 min | ||
[[File:Etch_rate.png|400px]] | |||