Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch): Difference between revisions
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= The ASE = | = The ASE = | ||
[[image:ASE.jpg|300x300px|right|thumb|STS ASE - positioned in cleanroom B-1]] | [[image:ASE.jpg|300x300px|right|thumb|STS ASE - positioned in cleanroom B-1. {{photo1}} ]] | ||
Name: M/PLEX ICP - ASE (Advanced Silicon Etcher) <br> | Name: M/PLEX ICP - ASE (Advanced Silicon Etcher) <br> | ||