Specific Process Knowledge/Characterization/Profiler: Difference between revisions
| Line 92: | Line 92: | ||
*Info about [[/Stylus profiler measurement uncertainty|measurement accuracy]]. | *Info about [[/Stylus profiler measurement uncertainty|measurement accuracy]]. | ||
*Using the analysis software | *Using the analysis software: [[Specific_Process_Knowledge/Characterization/Profiler/Apex software|Apex software access & tips]] | ||
*Info about making [https://labmanager.dtu.dk/view_binary.php?fileId=4699 2D stress measurements] ''(requires login)''. This text was removed from the user manual in LabManager as most users will want to make 3D stress measurements. It counts as "3D" if you wish to make 2 perpendicular scans. A "2D" stress scan means a single line scan per wafer - the software does not even allow manual rotation of the stage for this type of scan. | *Info about making [https://labmanager.dtu.dk/view_binary.php?fileId=4699 2D stress measurements] ''(requires login)''. This text was removed from the user manual in LabManager as most users will want to make 3D stress measurements. It counts as "3D" if you wish to make 2 perpendicular scans. A "2D" stress scan means a single line scan per wafer - the software does not even allow manual rotation of the stage for this type of scan. | ||
'''Acceptance test''' | '''Acceptance test''' | ||
*[[ | *[[File:Appendix 3 Acceptance test p17 final_v2_Completed.pdf|Acceptance test results]] on the P17 | ||
*Vendor's own [ | *Vendor's own [https://labmanager.dtu.dk/view_binary.php?fileId=5545 conformity test results] after installation ''(requires login)''. | ||
===Equipment performance and process related parameters=== | ===Equipment performance and process related parameters=== | ||