Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/OldConfig: Difference between revisions
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|ItemName= Available gasses and gas chemistry | |ItemName= Available gasses and gas chemistry | ||
|ItemConfiguration= '''Available gasses:''' | |ItemConfiguration= '''Available gasses:''' | ||
* SF<sub>6</sub>: 50 sccm | * SF<sub>6</sub>-1: 1200 sccm | ||
* SF<sub>6</sub>-2: 50 sccm | |||
* O<sub>2</sub>: 50 sccm | * O<sub>2</sub>: 50 sccm | ||
* Ar: 283 | * Ar: 283 | ||
| Line 72: | Line 73: | ||
}} | }} | ||
|} | |} | ||
==== Configuration valid from May 25 2022 to June 13 2022 ==== | ==== Configuration valid from May 25 2022 to June 13 2022 ==== | ||