Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

@@ Line 711: / Line 711: @@
 ==Advanced Field alignment (TSA)==
+<span style="color:red">New specs after the new writehead has been installed - section will be updated soon.</span>
-'''Overlay accuracy (spec):''' 0.25µm (5x5mm<sup>2</sup> area)
+'''Overlay accuracy (spec):''' 0.25 µm (5x5 mm<sup>2</sup> area)
 Shift, rotation, scaling, and shearing is determined and set by global alignment marks. The shift is corrected locally by automatic alignment to one mark in each field (chip).
@@ Line 730: / Line 731: @@
 |-style="background:WhiteSmoke; color:black"
 |rowspan="2" align="center"|25 fields
 nm, high res camera
 (Taran Mar 2019)
 |'''X'''
-| 50±75
+| 50 ±75
-| 70±75
+| 70 ±75
 |-
 |-style="background:WhiteSmoke; color:black"
 |'''Y'''
-| 150±50
+| 150 ±50
-| 128±50
+| 128 ±50
 |-
 |-style="background:WhiteSmoke; color:black"
 |rowspan="2" align="center"|Scaled first print, 10 fields
 nm, high res camera
 (Taran Mar 2019)
 |'''X'''
-| -25±50
+| -25 ±50
-| -5±50
+| -5 ±50
 |-
 |-style="background:WhiteSmoke; color:black"
 |'''Y'''
-| 100±50
+| 100 ±50
-| 120±50
+| 120 ±50
 |-
 |-style="background:WhiteSmoke; color:black"
 |rowspan="2" align="center"|25 fields
 nm, high res camera
 (Taran Mar 2019)
 |'''X'''
-| 100±75
+| 100 ±75
-| 108±75
+| 108 ±75
 |-
 |-style="background:WhiteSmoke; color:black"
 |'''Y'''
-| 0±50
+| 0 ±50
-| 16±50
+| 16 ±50
 |}
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