Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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The alignment marks must be placed within the BSA windows. The Overview camera only shows the top side of the substrate, and cannot be used to locate the BSA marks. | The alignment marks must be placed within the BSA windows. The Overview camera only shows the top side of the substrate, and cannot be used to locate the BSA marks. | ||
{| cellpadding="2" style="border: 2px solid darkgray;" align=" | {| cellpadding="2" style="border: 2px solid darkgray;" align="center" | ||
! width="320" | | ! width="320" | | ||
! width="320" | | ! width="320" | | ||
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'''Backside alignment test:''' | '''Backside alignment test:''' | ||