Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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==Back Side Alignment== | ==Back Side Alignment== | ||
'''Overlay accuracy (spec):''' 1.0 µm | |||
''' | '''BSA windows:''' along the X and Y axes, 10 mm wide x 46 mm long, starting 14.5 mm from the center. | ||
''' | '''Camera field of view (W x H):''' 640 µm x 480 µm | ||
[[Image:MLA150_BSA_Backside.JPG|center|300px|thumb|Image of a BSA alignment mark during alignment. The mark is 300 µm wide. The blue cross-hair is ~18 µm. ]] | |||
The alignment marks must be placed within the BSA windows. The Overview camera only shows the top side of the substrate, and cannot be used to locate the BSA marks. | The alignment marks must be placed within the BSA windows. The Overview camera only shows the top side of the substrate, and cannot be used to locate the BSA marks. | ||