Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 03 processing: Difference between revisions

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-| Overview camera image of a TSA alignment mark during alignment.<br/> The circle is 3mm in diameter, the alignment mark is 300 µm. The blue cross-hair is ~400 µm. ||  Low Res camera image of a TSA alignment mark during alignment.<br/> The mark is 300 µm wide. The blue cross-hair is ~18 µm. || High Res camera image of a TSA alignment mark during alignment.<br/> The lines of the cross are 20 µm wide. The blue cross-hair is ~7 µm.
+| Overview camera image of a TSA alignment mark during alignment.<br/> The circle is 3 mm in diameter, the alignment mark is 300 µm. The blue cross-hair is ~400 µm. ||  Low Res camera image of a TSA alignment mark during alignment.<br/> The mark is 300 µm wide. The blue cross-hair is ~18 µm. || High Res camera image of a TSA alignment mark during alignment.<br/> The lines of the cross are 20 µm wide. The blue cross-hair is ~7 µm.
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