Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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==Writing speed== | ==Writing speed== | ||
<span style="color:red">New specs after the new writehead has been installed - section will be updated soon.</span> | |||
According to specs (after being converted to write mode 2), the writing speed of Aligner: Maskless 02 is 1200 mm<sup>2</sup>/min in fast mode. Using the high quality exposure mode cuts this speed by 2.5, to approximately 480 mm<sup>2</sup>/min. The writing speed for a 100x100 mm<sup>2</sup> area measured after being modified to write mode 2 tool (2023-03-21) of the machine was ~1200 mm<sup>2</sup>/min. | According to specs (after being converted to write mode 2), the writing speed of Aligner: Maskless 02 is 1200 mm<sup>2</sup>/min in fast mode. Using the high quality exposure mode cuts this speed by 2.5, to approximately 480 mm<sup>2</sup>/min. The writing speed for a 100x100 mm<sup>2</sup> area measured after being modified to write mode 2 tool (2023-03-21) of the machine was ~1200 mm<sup>2</sup>/min. | ||