Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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*In '''Shot shape display''' check off '''Field boundary, Colored shot rank, Fill in a pattern''' and choose '''ASD''' on the '''Shot form''' drop down | *In '''Shot shape display''' check off '''Field boundary, Colored shot rank, Fill in a pattern''' and choose '''ASD''' on the '''Shot form''' drop down | ||
*The pattern is now visible and one can zoom in to see individual beam shots and how they overlap with the selected scan pitch | *The pattern is now visible and one can zoom in to see individual beam shots and how they overlap with the selected scan pitch | ||
*Once verified, close '''Shot shape display''' and '''Array check program''' | |||
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