Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
| Line 250: | Line 250: | ||
=Job file compilation= | =Job file compilation= | ||
Once the files are transferred to the EBL control computer they can be compiled into a magazine file. The Unix interface has several desktops. Desktop one is used for EBL control and desktop two is used for file compilation. In a terminal window on desktop two the SDF, JDF and V30 files can be compiled into a MGN file with SCHD command by writing | Once the files are transferred to the EBL control computer they can be compiled into a magazine file. The Unix interface has several desktops. Desktop one is used for EBL control and desktop two is used for file compilation. In a terminal window on desktop two the SDF, JDF and V30 files can be compiled into a MGN file with the SCHD command. Compile the files with the following procedure | ||
*Select a terminal window | |||
*Make sure to be in the correct folder by writing "cd job/danchip" | |||
*Compile by writing "schd -exptime sdffilename", replacing sdffilename with the actual filename | |||
*Verify that the compiler presents a sequence list with a time estimate, this indicates successful compilation | |||
If compilation is successful the terminal will provide a table of exposure sequences and their corresponding exposure times. Also, a .MGN file will be generated in the same folder as the SDF file. This file holds all relevant exposure information and it is this file one will load to the Expose module to initiate exposure. | If compilation is successful the terminal will provide a table of exposure sequences and their corresponding exposure times. Also, a .MGN file will be generated in the same folder as the SDF file. This file holds all relevant exposure information and it is this file one will load to the Expose module to initiate exposure. | ||