Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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All of the calibration data is now saved and the system is ready for exposure. | |||
==Job execution== | |||
The job and the system is now ready to execute the exposure. | |||
*Open the '''Exposure''' program from the '''EBX Menu''' | |||
*In the '''Exposure''' program click '''File''' | |||
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | |||
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| [[image:9500exposure1.png|500px]] | |||
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'''Expose''' window with .mgn file loaded for exposure. Image: Thomas Pedersen. | |||
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=Development= | =Development= | ||