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Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions

Thope (talk | contribs)
Thope (talk | contribs)
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Alle of the calibration data is now saved and the system is ready for exposure.
All of the calibration data is now saved and the system is ready for exposure.
 
==Job execution==
The job and the system is now ready to execute the exposure.
 
*Open the '''Exposure''' program from the '''EBX Menu'''
*In the '''Exposure''' program click '''File'''
 
 
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"
|-
| [[image:9500exposure1.png|500px]]
|-
| colspan="1" style="text-align:center;|
'''Expose''' window with .mgn file loaded for exposure. Image: Thomas Pedersen.
|}


=Development=
=Development=