Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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*Select the '''Current''' subprogram and click '''Execute''' in the '''Calibration''' window | *Select the '''Current''' subprogram and click '''Execute''' in the '''Calibration''' window | ||
The stage moves to the faraday cup to measure beam current. This takes 15 seconds and the '''Calibration''' window will display the measured beam current. Note this down for the Labmanager usage log. | The stage moves to the faraday cup to measure beam current. This takes 15 seconds and the '''Calibration''' window will display the measured beam current. Note this down for the Labmanager usage log. If the value is more than 5% of the expected beam current call the e-beam responsible for assistance. | ||
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | {| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | ||