Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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Beamer uses a node based system where nodes are applied in sequence. In this example there is only an import and an export node. | Beamer uses a node based system where nodes are applied in sequence. In this example there is only an import and an export node. | ||
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Each node has several options and these can be changed by double clicking the node. For the export node we will need to choose the correct machine in "Machine Type", the DTU Nanolab system is "JBX-9500FS (100kV)". On the advanced tab we will choose "Floating" field ordering and "Center to Field". This will ensure that our features/pattern will be written in the center of the writing field. The setup will look like the parameters below. | Each node has several options and these can be changed by double clicking the node. For the export node we will need to choose the correct machine in "Machine Type", the DTU Nanolab system is "JBX-9500FS (100kV)". On the advanced tab we will choose "Floating" field ordering and "Center to Field". This will ensure that our features/pattern will be written in the center of the writing field. The setup will look like the parameters below. | ||
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Beamer uses a node based system where nodes are applied in sequence. In this example there is only an import and an export node. | |||
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