Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions

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 =Job file verification=
-To ensure that the pattern and exposure parameters are correct the MGN file should always be verified to some extent. This can be done using the '''ACHK''' program found on the '''Analysis''' pane should always do a brief verification of the content of the .mgn file. From the right hand side of desktop two click on the “ACHECK” tool. From the window opening up choose “File” -> “Open” and open your magazine file.
+To ensure that the pattern and exposure parameters are correct the MGN file should always be verified to some extent. This can be done using the Array Check Program '''(ACHK)''' program found on the '''Analysis''' pane. The '''Analysis''' pane is usually open on the right hand side of the second desktop, if not, it can be opened from the '''EBX Menu.''' Open '''ACHK''' from the '''Analysis''' pane and click  “File” -> “Open” and open your magazine file.
 =Sample mounting=