Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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MAGAZIN 'MYFIRSTEBL' The magazine name is MYFIRSTEBL; max. 20 capital letters | MAGAZIN 'MYFIRSTEBL' The magazine name is MYFIRSTEBL; max. 20 capital letters | ||
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END 8 After exposure, cassette 8 will be remain on the stage | END 8 After exposure, cassette 8 will be remain on the stage | ||
</pre> | </pre> | ||
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JOB/W 'MYFIRSTEBL',4 4inch wafer | JOB/W 'MYFIRSTEBL',4 4inch wafer | ||