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Specific Process Knowledge/Lithography/UVExposure: Difference between revisions

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|style="background:LightGrey; color:black"|Minimum feature size
|style="background:LightGrey; color:black"|Minimum feature size
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|style="background:WhiteSmoke; color:black"|
*1.5µm down to 1µm
~1 µm
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*1.5µm down to 0.5µm
~1 µm
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*2µm down to 1µm
~1 µm
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*1µm down to 0.6µm
~1 µm
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*2µm down to 1µm
~1 µm
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
|-
|-
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*UV250 optics optional
*UV250 optics optional
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*365nm LED
365nm LED
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*375nm laserdiodes
375nm laserdiodes
or
*405nm laserdiodes
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*405nm laserdiodes
405nm laserdiodes
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*1000 W Hg-Xe lamp
*1000 W Hg-Xe lamp
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|style="background:LightGrey; color:black"|Exposure mode
|style="background:LightGrey; color:black"|Exposure mode
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Flood exposure
*Proximity
*Proximity
*Contact
*Contact:
**Soft contact
**Soft contact
**Hard contact
**Hard contact
**Vacuum contact
**Vacuum contact
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Flood exposure
*Proximity
*Proximity
*Contact
*Contact:
**Soft contact
**Soft contact
**Hard contact
**Hard contact
**Vacuum contact
**Vacuum contact
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Projection  
*Projection:
**Pneumatic auto-focus
**Pneumatic auto-focus
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Projection  
*Projection:
**Optical auto-focus
**Optical auto-focus
**Pneumatic auto-focus
**Pneumatic auto-focus
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Projection  
*Projection:
**Pneumatic auto-focus
**Pneumatic auto-focus
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
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