Specific Process Knowledge/Etch/Wet III-V Etches: Difference between revisions
No edit summary |
|||
| Line 17: | Line 17: | ||
For dry etching III-V materials see | For dry etching III-V materials see | ||
*[[Specific Process Knowledge/Etch/III-V ICP|III-V ICP]] | *[[Specific Process Knowledge/Etch/III-V ICP|III-V ICP]] | ||
*[[Specific Process Knowledge/Etch/III-V RIE|III-V RIE - Plassys]] | *[[Specific Process Knowledge/Etch/III-V RIE|III-V RIE - Plassys]] (will be decommissioned October 2025) | ||