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==Pegasus 4 - 150mm silicon oxide and silicon nitride etching==
==Pegasus 4 - 150mm silicon oxide and silicon nitride etching==


'''The tool is already installed and ready to process. You still have to make manual alignment in the cassette.
'''


  [[Image:Peg3and4 front 2.JPG |frame|left|x300px|The DRIE-Pegasus3 and DRIE-Pegasus4 operator station and cassette loading stations, {{photo1}}]]
  [[Image:Peg3and4 front 2.JPG |frame|left|x300px|The DRIE-Pegasus3 and DRIE-Pegasus4 operator station and cassette loading stations, {{photo1}}]]
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