Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions
Appearance
| Line 807: | Line 807: | ||
The Aligner: Maskless 03 has a 405 nm laser light source with a FWHM of ~1 nm. | The Aligner: Maskless 03 has a 405 nm laser light source with a FWHM of ~1 nm. | ||
{|border="1" cellspacing="1" cellpadding=" | {|border="1" cellspacing="1" cellpadding="10" style="text-align:left;" | ||
|- | |- | ||