Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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Two alignment options are available: top side alignment (TSA) with a split field or a video microscope and back side alignment (BSA) with BSA microscope. It is also possible to make IR- light alignment. | Two alignment options are available: top side alignment (TSA) with a split field or a video microscope and back side alignment (BSA) with BSA microscope. It is also possible to make IR- light alignment. | ||
Training videos: | |||
'''Training videos:''' | |||
[https://www.youtube.com/watch?v=o8IBtfQHNzU Operation] | [https://www.youtube.com/watch?v=o8IBtfQHNzU Operation] | ||