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Specific Process Knowledge/Lithography/UVExposure: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,931 edits
Line 174: Line 174:
Two alignment options are available: top side alignment (TSA) with a split field or a video microscope and back side alignment (BSA) with BSA microscope. It is also possible to make IR- light alignment.
Two alignment options are available: top side alignment (TSA) with a split field or a video microscope and back side alignment (BSA) with BSA microscope. It is also possible to make IR- light alignment.


'''Training videos: [https://www.youtube.com/watch?v=o8IBtfQHNzU Operation] [https://www.youtube.com/watch?v=rvUuXYgw-xU Alignment]''' (on Aligner: MA6-2, but KS Aligner is the same model)
Training videos:  
 
[https://www.youtube.com/watch?v=o8IBtfQHNzU Operation]
 
[https://www.youtube.com/watch?v=rvUuXYgw-xU Alignment]




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