Specific Process Knowledge/Lithography/Coaters/GammaEbeam: Difference between revisions
| Line 91: | Line 91: | ||
| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
Silicon, III-V, and glass | Silicon, III-V, and glass | ||
Resists and crystalbond are not allowed in the HMDS module | Resists and crystalbond are not allowed in the HMDS module | ||
|- | |- | ||
|style="background:LightGrey; color:black"|Batch | |style="background:LightGrey; color:black"|Batch | ||