Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions
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==Phosphorous doping test after hardware and software upgrades== | ==Phosphorous doping test after hardware and software upgrades== | ||
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In 2022, the POCl<sub>3</sub> line on the furnace was modified to make the setup more safe. At the same time some software changes were also made, and the recipes on the furnace were updated. | In 2022, the POCl<sub>3</sub> line on the furnace was modified to make the setup more safe. At the same time some software changes were also made, and the recipes on the furnace were updated. | ||