Specific Process Knowledge/Lithography/DUVStepperLithography: Difference between revisions
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{{:Specific Process Knowledge/Lithography/Coaters/GammaDUV}} | {{:Specific Process Knowledge/Lithography/Coaters/GammaDUV}} | ||
=DUV Stepper= | ==DUV Stepper== | ||
[[Image:stepper_image_1.jpg|300x300px|right|thumb|DUV Stepper is placed in F-3]] | [[Image:stepper_image_1.jpg|300x300px|right|thumb|DUV Stepper is placed in F-3]] | ||
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Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=273 LabManager] | Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=273 LabManager] | ||
==Process information== | ===Process information=== | ||
*[[/Optimization and Simulation|Optimization and Simulation]] | *[[/Optimization and Simulation|Optimization and Simulation]] | ||
*[[/Reticle Design|Reticle Design]] | *[[/Reticle Design|Reticle Design]] | ||
*[[/Process Instructions|Process Instructions]] | *[[/Process Instructions|Process Instructions]] | ||
== Equipment performance and process related parameters == | == =Equipment performance and process related parameters=== | ||
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