Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!rowspan="2"| AZ 5214E<br><span style="color:red">Old German version</span> | !rowspan="2"| AZ 5214E<br><span style="color:red">Old German version</span> | ||
| 2021-08-19 | | 2021-08-19 | ||
| 1.5 µm | | 1.5 µm | ||
| Fast | | Fast | ||
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| 2 µm | | 2 µm | ||
| Dev: SP60s | | Dev: SP60s | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
| 2021-08-19 | | 2021-08-19 | ||
| 1.5 µm | | 1.5 µm | ||
| Quality | | Quality | ||
| Line 487: | Line 488: | ||
|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
!rowspan="2"| AZ 5214E image reversal<br><span style="color:red">Old German version</span> | !rowspan="2"| AZ 5214E image reversal<br><span style="color:red">Old German version</span> | ||
| 2020-03-01 | | 2020-03-01 | ||
| 2.2 µm | | 2.2 µm | ||
| Fast | | Fast | ||
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|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
| 2021-08-25 | | 2021-08-25 | ||
| 2.2 µm | | 2.2 µm | ||
| Quality | | Quality | ||
| Line 508: | Line 509: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!AZ MiR 701<br><span style="color:red">Old PFOA containing version</span> | !AZ MiR 701<br><span style="color:red">Old PFOA containing version</span> | ||
| 2021-08-25 | | 2021-08-25 | ||
| 1.5 µm | | 1.5 µm | ||
| Fast | | Fast | ||
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| 1.25 µm<br>Tested using dehydration reducing measures | | 1.25 µm<br>Tested using dehydration reducing measures | ||
| PEB: 60s@110°C, Dev: SP60s | | PEB: 60s@110°C, Dev: SP60s | ||
|- | |- | ||
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|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
!rowspan="2"| AZ nLOF 2020 | !rowspan="2"| AZ nLOF 2020 | ||
| 2020-02-01 | | 2020-02-01 | ||
| 2.0 µm | | 2.0 µm | ||
| Fast | | Fast | ||
| Line 530: | Line 530: | ||
|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
| 2020-03-01 | | 2020-03-01 | ||
| 2.0 µm | | 2.0 µm | ||
| Quality | | Quality | ||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!AZ 5214E<br><span style="color:green">New Japanese version</span> | !AZ 5214E<br><span style="color:green">New Japanese version</span> | ||
| 2023-01-06 | | 2023-01-06 | ||
| 1.5 µm | | 1.5 µm | ||
| Fast | | Fast | ||
| Line 554: | Line 554: | ||
|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
!AZ 5214E image reversal<br><span style="color:green">New Japanese version</span> | !AZ 5214E image reversal<br><span style="color:green">New Japanese version</span> | ||
| 2023-01-11 | | 2023-01-11 | ||
| 2.2 µm | | 2.2 µm | ||
| Fast | | Fast | ||
| Line 566: | Line 566: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!AZ MiR 701<br><span style="color:green">New PFOA free version</span> | !AZ MiR 701<br><span style="color:green">New PFOA free version</span> | ||
| 2021-08-25 | | 2021-08-25 | ||
| 1.5 µm | | 1.5 µm | ||
| Fast | | Fast | ||
| Line 578: | Line 578: | ||
|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
!AZ 4562<br><span style="color:green">New Japanese version</span> | !AZ 4562<br><span style="color:green">New Japanese version</span> | ||
| 2021-12-07 | | 2021-12-07 | ||
| 10 µm | | 10 µm | ||
| Fast | | Fast | ||