Specific Process Knowledge/Lithography/Development: Difference between revisions
| Line 527: | Line 527: | ||
|style="background:LightGrey; color:black"|Agitation | |style="background:LightGrey; color:black"|Agitation | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
Rotational agitation at 15 rpm | |||
|- | |- | ||
|style="background:LightGrey; color:black"|Rinse | |style="background:LightGrey; color:black"|Rinse | ||
| Line 543: | Line 543: | ||
| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
All cleanroom approved materials | *All cleanroom approved materials | ||
*Film, or pattern, of all materials except Type IV | |||
Film or pattern of all | |||
|- | |- | ||
|style="background:LightGrey; color:black"|Batch | |style="background:LightGrey; color:black"|Batch | ||