Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
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[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=358 Oven: HMDS 2 in LabManager] | [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=358 Oven: HMDS 2 in LabManager] | ||
'''Process information''' | '''Process information:''' | ||
*Recipe 1: baseline prime process with 5 min HMDS priming time | *Recipe 1: baseline prime process with 5 min HMDS priming time | ||