Specific Process Knowledge/Etch/DRIE-Pegasus/DREM: Difference between revisions

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{| class="wikitable hideable hidden" border="1" cellspacing="1" cellpadding="2"  align="left" width="430px"
{| class="wikitable hideable hidden"  
!colspan="3" style="text-align:left;" | [[image:Thermal treat your sample.png|x100px|Thermal treatment of your sample]] Thermal treatment of your sample
{{Template:Peg2cont1
|-
|stepname= 0 Home matching
!Entry page in LabAdviser
|generalbox=
!Techniques
|timebox=90t
!Materials
|presbox=7T
|-
|gasbox=sulf
|rowspan="5" valign="top"|[[Specific Process Knowledge/Thermal Process|Thermal Process]]
|RFbox= yes, lots
|Annealing (>350C)
|matchbox= lit
|Si, PECVD layers, Al, BCB curing, Polymer
|miscbox=na
|-
}}
|Oxidation
|Si wafers
|-
|Doping with B/P
|Si wafers
|-
|Pyrolysis
|Resists: AZ, SU8, PDMS
|-
|Rapid Thermal Anneal (RTP)
|SiO2, Si3N4, Ti, III-V
|-
|
[[Specific Process Knowledge/Lithography/Baking| Lithography/Baking]] <br>
|Baking (<300dg)
|baking resist and polymers
|-
|}
|}
{| class="wikitable hideable hidden" border="1" cellspacing="1" cellpadding="2"  align="left" width="430px"
{| class="wikitable hideable hidden" border="1" cellspacing="1" cellpadding="2"  align="left" width="430px"

Revision as of 17:05, 15 December 2022

The DREM processes

DREM 2kW micro

DREM 2kW micro
Recipe General Pressure Gases Generators Matching Tem- pera- ture Results
C4F8 SF6 O2 Ar Coil Platen Coil Platen
Platen Stb S/E Dp Et Cyc Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Runs Keywords
U/D H/L D B M D B M D B M D B M D B M D B M D B M L T L T L T L T
DREM 2kW micro Pump to base, Clamp Substrate, home platen matching unit, stabilisation 8
U HF D/E 1.2 3 100% 100% 0.3@5 0.5@50 200 0.5@100 5 0.3@200 0.5@200 15 2@15 0.3@100 200 150 150 2 2 1 1@1 1@100 1 40 50 40 50 32.5 51.9 32.5 51.9 0
DREM 2kW micro Pump to base, Clamp Substrate, home platen matching unit, stabilisation 1
U HF D/E 1.2 3 100% 100% 0.3@5 0.5@50 200 0.5@100 5 0.3@200 0.5@200 15 2@15 0.3@100 200 150 150 2 2 1 1@1 1@100 1 40 50 40 50 32.5 51.9 32.5 51.9 -19


Sandbox area below - disregard content

DREM 0.2 kW v2
Recipe General Pressure Gases Generators Matching Tem- pera- ture BGC EM EPD Results
Dp Et SF6-1 SF6-2 O2 Ar N2 He Coil Platen Coil Platen
Platen St S/E Dp Et R D B M D B M Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Dp Et Runs Keywords
DREM 0.2kW newMFC 5T, NE, NE link2recipt nice!
HF D/E 2.8 2.6 100% 100% 0.3@5 0.5@15 0.25 0.25 1 0.9@1 1@20 1 40 50 40 50 38.2 53.8 38.2 53.8 0


0 Home matching  
General Time Pressure Gas " >Power Matching Miscellaneous
Setting 90t 7T sulf yes, lots lit na

Overview of micro and nano fabrication steps - a guide to where you can find fabrication information in LabAdviser

-
Make a mask on your sample


0 Home matching  
General Time Pressure Gas " >Power Matching Miscellaneous
Setting 90t 7T sulf yes, lots lit na
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