Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions
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With 150 sccm N2 low through 25°C POCl<sub>3</sub> liquid + 3 slm N<sub>2</sub> high + 0.5 slm O<sub>2</sub>, 3300 ppm Cl<sub>2</sub> is created in the tube. These 3300 ppm Cl<sub>2</sub> must be diluted to less than 0.5 ppm (the TLV value). | With 150 sccm N2 low through 25°C POCl<sub>3</sub> liquid + 3 slm N<sub>2</sub> high + 0.5 slm O<sub>2</sub>, 3300 ppm Cl<sub>2</sub> is created in the tube. These 3300 ppm Cl<sub>2</sub> must be diluted to less than 0.5 ppm (the TLV value). | ||
The tube diameter is 16 cm and the length without ball valve is about 125 cm, and thus the volume is about 25 L. After the phosphorus pre-deposition step, the N<sub>2</sub> high flow (3 SLM) is on during the annealing/N<sub>2</sub> post purge, the cooling and a waiting step. The time for the waiting step is 30 minutes, so even if the annealing time is set to 0 minutes, and the furnace does not have to cool down, there will still be an N<sub>2</sub> high flow for 30 minutes to remove the POCl<sub>3</sub> from the furnace. The waiting time is the same in the abort recipe that is activated, if the | The tube diameter is 16 cm and the length without ball valve is about 125 cm, and thus the volume is about 25 L. After the phosphorus pre-deposition step, the N<sub>2</sub> high flow (3 SLM) is on during the annealing/N<sub>2</sub> post purge, the cooling and a waiting step. The time for the waiting step is 30 minutes, so even if the annealing time is set to 0 minutes, and the furnace does not have to cool down, there will still be an N<sub>2</sub> high flow for 30 minutes to remove the POCl<sub>3</sub> from the furnace. The waiting time is the same in the abort recipe that is activated, if the POCL doping recipe is aborted. | ||
The recipe can be modified with other temperatures and names. | The recipe can be modified with other temperatures and names. | ||