Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/Workspaces: Difference between revisions
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!Recommended mode | !Recommended mode | ||
|Roughness measurement can be done in both Contact, Tapping and ScanAsyst mode. We recommend '''ScanAsyst mode''' because of less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. However it also works fine in tapping mode. | |Roughness measurement can be done in both Contact, Tapping and ScanAsyst mode. We recommend '''ScanAsyst mode''' because of less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. However it also works fine in tapping mode. | ||
|For Topographic measurements with no steep/abrupt steps we also recommend '''ScanAsyst mode''' due to less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. | |For Topographic measurements with no steep/abrupt steps we also recommend '''ScanAsyst mode''' due to less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. We also recommend '''Tapping mode''' because we experience less problems when the tip end is slightly broken. | ||
|For Steep/abrupt steps but no high aspect ratio structures we still recommend '''Tapping mode''' or '''ScanAsyst mode" . | |For Steep/abrupt steps but no high aspect ratio structures we still recommend '''Tapping mode''' or '''ScanAsyst mode" . | ||
|For High aspect ratio measurements we recommend Tapping mode. There is not yet a ScanAsyst probe developed for high aspect ratio. Therefore we recommend '''Tapping mode'''. | |For High aspect ratio measurements we recommend Tapping mode. There is not yet a ScanAsyst probe developed for high aspect ratio. Therefore we recommend '''Tapping mode'''. | ||