Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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==Optical Profiler (Sensofar S Neox) == | ==Optical Profiler (Sensofar S Neox) == | ||
[[image:IMG_4555.JPG|275x275px|right|thumb|Optical Profiler (Sensofar): positioned in the clean room B-1)]] | [[image:IMG_4555.JPG|275x275px|right|thumb|Optical Profiler (Sensofar): positioned in the clean room B-1), Photo: Berit Herstrøm@DTU Nanolab]] | ||
The Sensofar S Neox 3D Optical Profiler has a sensor head that combines confocal, interferometry and focus variation techniques as well as thick and thin film measurement capabilities. | The Sensofar S Neox 3D Optical Profiler has a sensor head that combines confocal, interferometry and focus variation techniques as well as thick and thin film measurement capabilities. | ||