Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4: Difference between revisions

Revision as of 12:20, 1 August 2022 view source Bghe (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators 7,318 edits →Pegasus 4 - 150mm silicon oxide and silicon nitride etching ← Older edit		Revision as of 12:32, 1 August 2022 view source Bghe (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators 7,318 edits →Process information Newer edit →
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	*[[Specific Process Knowledge/Etch/DRIE-Pegasus 4/showerheadchange\|Change of showerhead in 2019]]		*[[Specific Process Knowledge/Etch/DRIE-Pegasus 4/showerheadchange\|Change of showerhead in 2019]]

	*[[Specific Process Knowledge/Etch/DRIE-Pegasus 4/picoscope\|Addition of Picoscope oscilloscope system for process monitoring in February 2019]]