Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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|style="background:LightGrey; color:black"|Height accuracy z (95 % confidence) | |style="background:LightGrey; color:black"|Height accuracy z (95 % confidence) | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
For very well defined steps ~ 2 % for a 1 µm step and ~ 1 % for a 25 µm step ([[/Stylus profiler measurement uncertainty| | For very well defined steps ~ 2 % for a 1 µm step and ~ 1 % for a 25 µm step (read about reducing and estimating the measurement uncertainty [[/Stylus profiler measurement uncertainty|here]]) | ||
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|style="background:LightGrey; color:black"|Max scan depth as a function of trench width W | |style="background:LightGrey; color:black"|Max scan depth as a function of trench width W | ||