Specific Process Knowledge/Characterization/Profiler: Difference between revisions
→Equipment performance and process related parameters: made a new subpage |
|||
| Line 54: | Line 54: | ||
|style="background:LightGrey; color:black"|Height accuracy z (95 % confidence) | |style="background:LightGrey; color:black"|Height accuracy z (95 % confidence) | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
For very well defined steps ~ 2 % for a 1 µm step and ~ 1 % for a 25 µm step ([[ | For very well defined steps ~ 2 % for a 1 µm step and ~ 1 % for a 25 µm step ([[/Stylus profiler measurement uncertainty|read about reducing and estimating the measurement uncertainty here]]) | ||
|- | |- | ||
|style="background:LightGrey; color:black"|Max scan depth as a function of trench width W | |style="background:LightGrey; color:black"|Max scan depth as a function of trench width W | ||