Specific Process Knowledge/Thermal Process/C4 Aluminium Anneal furnace: Difference between revisions
No edit summary |
|||
| Line 15: | Line 15: | ||
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=90 Aluminium Anneal furnace (C4)]''' | '''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=90 Aluminium Anneal furnace (C4)]''' | ||
==Process knowledge== | ==Process knowledge== | ||
*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing|Annealing]] page | *Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing|Annealing]] page | ||
==Overview of the performance of Aluminium Anneal furnace and some process related parameters== | ==Overview of the performance of Aluminium Anneal furnace and some process related parameters== | ||