Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3: Difference between revisions
| Line 44: | Line 44: | ||
=== Other etch processes === | === Other etch processes === | ||
More processes, such as for DUV resist, are currently being developed, but they are not quite 'ready for publication' at LabAdviser so please contact Jonas (mailto:jmli@dtu.dk) for more information. | More processes, such as for DUV resist, are currently being developed, but they are not quite 'ready for publication' at LabAdviser so please contact Jonas (mailto:jmli@dtu.dk) for more information. | ||